MAX609 In Stock

Description: Right-Handed, 6-Axis, 75 V, NanoMax Flexure Stage

Part Number MAX609
Category Motion Control
Manufacturer ThorLabs

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ThorLabs MAX609



The Thorlabs MAX609 6-axis NanoMax stage is the ultimate solution for precision positioning with adjustable actuators. With 4 mm (0.16") X, Y, Z travel and 6° (105 mrad) θx, θy, θz travel (roll, pitch, yaw), this stage is ideal for a variety of applications. In terms of automated alignment equipment, each axis can be configured to meet the specific accuracy and automation needs of the application. The MAX609 is available with or without an internal closed-loop or open-loop piezo and features an optional piezo actuator that provides 30 µm of travel. With MAX609's modular structure, you can easily take its drives out and replace them with new ones as needed for different tasks. This makes it adaptable and practical for many applications. All adjusters are also bonded to the base to minimize crosstalk.

The MAX609's external drive is customizable, and the theoretical resolution depends on the external drive selected. The MAX609 is typically used with a BPC30X series controller, and also features an internal closed-loop piezo drive based on a 16-bit DAC with a theoretical resolution of 1.0 nm for X, Y, and Z, and 0.018 µRad for roll and pitch. With its high-accuracy, customizable design, and wide range of features, the MAX609 is ideal for your positioning needs. The MAX609 6-axis NanoMax stage is a precision positioning solution that simplifies the alignment process. Each stage is equipped with a stainless steel probe in front of a movable platform that serves as a common pivot point for all axes of rotation, and is required to compensate for lateral motion when adjusting θx, θy, and θz. is eliminated and alignment time is shortened. As the movable platform moves, the pivot also moves relative to the base so that it maintains its position relative to the movable platform.

For your convenience, we offer pre-configured stages with either differential micrometer actuators or stepper motor actuators for immediate use. The modular design of the 6-axis NanoMax stages from Thorlabs allows for easy customization as the drive can be removed or replaced as needed. The drive is directly coupled to the base to minimize unwanted motion in the system, making it an ideal solution for applications requiring sub-micron resolution.

Load Capacity 1 kg
Max Input Voltage 15 V (Stepper Motor)
Max Arcuate Displacement 80 µm
Internal Drive Closed Loop Piezo
Theoretical Resolution (Internal) 1.0 nm for X,Y, Z. 0.018 µRad for Roll, Pitch, Yaw.
Theoretical Resolution (External) Customizable
Piezo Travel 30 µm
Weight 11 lbs / 5 kg (w/o drives)


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